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  1. Deposition Processes - mems-exchange.org

    • One of the basic building blocks in MEMS processing is the ability to deposit thin films of material. In this text we assume a thin film to have a thickness anywhere between a few nanometer to about 100 micromet… See more

    Chemical Vapor Deposition

    In this process, the substrate is placed inside a reactor to which a number of gases are supplied. The fundamental principle of the process is that a chemical reaction takes plac… See more

    MEMS and Nanotechnology Exchange
    Electrodeposition

    This process is also known as "electroplating" and is typically restricted to electrically conductive materials. There are basically two technologies for plating: Electroplati… See more

    MEMS and Nanotechnology Exchange
    Epitaxy

    This technology is quite similar to what happens in CVD processes, however, if the substrate is an ordered semiconductor crystal (i.e. silicon, gallium arsenide), it is possible wit… See more

    MEMS and Nanotechnology Exchange
    Thermal Oxidation

    This is one of the most basic deposition technologies. It is simply oxidation of the substrate surface in an oxygen rich atmosphere. The temperature is raised to 800° C-110… See more

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  1. Deposition processes One of the basic building blocks in MEMS processing is the ability to deposit thin films of material with a thickness anywhere between one micrometre, to about 100 micrometres. The NEMS process is the same, although the measurement of film deposition ranges from a few nanometres to one micrometre.

    In this process, the substrate is placed inside a reactor to which a number of gases are supplied. The fundamental principle of the process is that a chemical reaction takes place between the source gases. The product of that reaction is a solid material with condenses on all surfaces inside the reactor.
    www.mems-exchange.org/MEMS/processes/depos…
    In MEMS and in fiber production the lasers are used rapidly to break down the precursor gas—process temperature can exceed 2000 °C—to build up a solid structure in much the same way as laser sintering based 3-D printers build up solids from powders.
    en.wikipedia.org/wiki/Chemical_vapor_deposition
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