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  1. MEMS Thin Film Deposition Processes - memsnet.org

    • One of the basic building blocks in MEMS processing is the ability to deposit thin films of material. In this text we assume a thin film to have a thickness anywhere between a few nanometer to about 100 micromet… See more

    Chemical Vapor Deposition

    In this process, the substrate is placed inside a reactor to which a number of gases are supplied. The fundamental principle of the process is that a chemical reaction takes place between the source gases. The product of t… See more

    Electrodeposition

    This process is also known as "electroplating" and is typically restricted to electrically conductive materials. There are basically two technologies for plating: Electroplating and Electroless plating. In the electro… See more

    Epitaxy

    This technology is quite similar to what happens in CVD processes, however, if the substrate is an ordered semiconductor crystal (i.e. silicon, gallium arsenide), it is possible with this process to continue building on … See more

    Thermal Oxidation

    This is one of the most basic deposition technologies. It is simply oxidation of the substrate surface in an oxygen rich atmosphere. The temperature is raised to 800° C-1100° C to speed up the process. This is als… See more

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