- MEMS stands for microelectromechanical system, which refers to technology that allows mechanical structures to be miniaturized and thoroughly integrated with electrical circuitry123. MEMS are mechanical sensors and actuators that are fabricated using micromachining batch technologies similar to those used for integrated circuits3. This translates into highly scalable production processes and low per-device production costs3. Common applications for MEMS include sensors, actuators, and process-control units2.Learn more:✕This summary was generated using AI based on multiple online sources. To view the original source information, use the "Learn more" links.MEMS refers to technology that allows mechanical structures to be miniaturized and thoroughly integrated with electrical circuitry, resulting in a single physical device that is actually more like a system, where “system” indicates that mechanical components and electrical components are working together to implement the desired functionality.www.allaboutcircuits.com/technical-articles/introdu…microelectromechanical system (MEMS), mechanical parts and electronic circuits combined to form miniature devices, typically on a semiconductor chip, with dimensions from tens of micrometres to a few hundred micrometres (millionths of a metre). Common applications for MEMS include sensors, actuators, and process-control units.www.britannica.com/technology/microelectromech…MEMS are mechanical sensors and actuators that are fabricated using micromachining batch technologies similar to those used for integrated circuits. This translates into highly scalable production processes and low per-device production costs. MEMS have feature sizes ranging from micrometers to millimeters.www.nanowerk.com/mems-explained.php
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